Resin dissolution rate measurement by dip |
RDA-760 |
Resin dissolution rate measurement by spin |
RDA-760Spin |
Resist development rate measurement (Standard model) |
RDA-790 |
Resist development rate measurement (High R max model) |
RDA-800 |
Resist development rate measurement (for developing by Organic/ Alkali solvent) |
RDA-800Twin |
Resist development rate measurement with QCM |
RDA-Qz3 |