Products

目的で選ぶ Products

 Coating / Developing / Baking

Automated | Coating / Developing / Baking

Manual / Semi automated | Coating / Developing

Manual | Baking

Manual | HMDS process


 Evaluation of resist properties

Resist development analysis/ Evaluation

Photo process exposure analysis

Resist evaluation equipment

Measurement & Evaluation service

 System for nanoimprint evaluation

UV / thermal nanoimprint